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Beam Shaper
Converts a typical quasi-gaussian excimer laser beam profile into
the preferable top-hat profile with uniform intensity at all points
of the beam. Top-selling HY120 series beam shapers are available in a wide
range of working distance and are unbeaten for >95% throughput efficiency.'
Specification
| Input profile |
Typical quasi-Gaussian |
| Output profile |
Top-hat to typically ±5% |
| Operating Wavelength |
Broadband (BB) version: 193-351 nmHY120/ Deep UV (DUV) sealed
version: 157 nm) |
| Output working distance |
300, 450, 650, 800 and 1000 mm |
| Output beam size |
10 x 20 mm (typical)Note: Standard homogenised
beam size is equal to X x Y mm where X and Y are the height and width of the
input beam to its half-power points. Smaller or larger homogenised areas are
easily obtained using a simple lens in conjunction with the HY120. |
| Output beam uniformity |
5 – 10% (typical) |
| Maximum input beam size |
45 x 45 mm overall30 x 30 mm to half-power points (X x Y) |
| Maximum input beam energy density |
2 J/cm2 |
| Overall dimensions |
110 x 110 x 40 mm |
| Weight |
1.0 kg |
| Mounting |
M6 post holder |
Ordering Information
| Model |
Order Code |
Working distance (mm) |
Operating wavelength |
| Two-axis |
HY120 |
300, 450, 650, 800, 1000 |
BB or DUV |
| Single-axis |
HY110 |
300, 450, 650, 800, 1000 |
BB or DUV |
| Spare optical elements(matched pair) |
HY |
300, 450, 650, 800, 1000 |
BB or DUV |
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