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Beam Transport
FL150 variable field lens
| A variable power lens with 48 mm diameter clear aperture, used to collimate or concentrate the beam, or guide it from a large mask area into the projection lens pupil |
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FL150M variable field lens
| As for FL150 but with 24 mm clear aperture for smaller lasers | |
BC beam collimator
| As for FL150 but with 2x beam diameter reduction, used as beam concentrator with collimated output. | |
BCM beam collimator
| As for BC but with 24 mm clear aperture, for smaller lasers | |
BET18 zoom beam expander
| Zoom beam expander with 2x expansion, 73 mm clear diameter output aperture and waist adjustable from 3 000 mm to infinity. Used to transport excimer beams over long distances with minimal degradation |  |
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