MicroMaster Features

MicroMaster is a complete small footprint workstation for UV laser micromachining.

It includes:

• excimer laser
• sophisticated beam delivery optics
• precision part motion
• flexible control software

The only thing the customer has to buy is the gas used by the laser itself.

Unlike most laser systems, MicroMaster is not a focal point processing machine. Instead, the laser beam is used to illuminate a mask, whose image is then projected onto the part at selected optical demagnification. Typically, different mask motifs are combined with laser firing and part motion to build up the desired complete machining pattern on the workpiece.

Every time the laser is fired, a layer of material approximately 0.1-1 µm thick is removed from an area defined by the mask motif, whose size on the part is typically in the range 10-1000 µm, with micron-scale resolution. Most polymers (not PTFE) can be machined, as well as hard materials like ceramics. Many applications involve selective removal of layers from sandwich-like structures.

You can find more details about UV micromachining in the technote Fundamentals of Excimer Laser Micromachining

Key Points

• The most fully equipped general-purpose turnkey workstation on the market, with unique ProcessPower software. Over 60 systems are installed worldwide.
• The ONLY system with continuously variable demag. under software control.
• Optec-design confocal 3-element process lens, with 1.5 µm resolution and through the lens (TTL) vision over the demag. range, means that when the part is in focus on the CCTV monitor, the UV is automatically in focus, with the machining area highlighted. WYSIWYG – What You See Is What You Get.
• System is reconfigurable and memorizes alternative settings, e.g. for different operators. When the LIN-50 mask selector is used in combination with the MVA (motorized variable aperture), an infinite number of combination motifs can be created and stored in PC memory as 'virtual' masks for later recall.
• ProcessPower software includes video measuring cursor, beam profiler, user-friendly process and set-up routines. It and accepts industry standard CAD input.
• Exclusive use of ATL SP300i short pulse excimer, patented sliding discharge, with the highest beam brightness of its class. Available in 248 nm or 193 nm versions.
• Holistic and ergonomic system design for operator ease-of-use and small footprint.