|
|
|
Standard MicroMaster Specification
| Laser |
| Wavelength |
248 nm (193 nm option) |
| Pulse energy |
18 mJ at 248 nm (10 mJ at 193 nm) |
| Repetition rate |
300 Hz (500 Hz option) |
| Pulse duration |
5–6 ns |
| Beam dimensions |
4 x 6 mm |
| Beam divergence |
2 x 1 mrad |
| Beam delivery |
| Energy control |
5–95% of source beam |
| Demagnification |
4–11.5 |
| UV optical resolution |
<1.5 µm |
| UV field |
up to 2 x 2 mm |
| Focus |
25 mm in steps of 2.5 µm |
| Energy density on target |
0.25–5 J/cm2 or up to 25 J/cm2 depending on beam concentrator option |
| Vision |
Off-axis 40x, through-the-lens 150-500x depending on demag. |
| Part Positioning |
| XY travel |
200 x 200 mm |
| XY Resolution |
1 µm |
| XY Repeatability |
1–2 µm |
| XY Speed |
40 mm/s |
| Theta (option) |
360° |
| Theta resolution |
0.01° |
| Theta speed |
30°/s |
| System Control |
| Controller |
Industrial PC: Pentium III, 512 MB RAM, 30 GB hard disk |
| Software |
Windows® XP-based |
|
