- Cover — Safety Cover
Interlocked safety cover provides protection from direct and reflected laser light

- Image — TTL Viewing
Embedded through-the-lens (TTL) image of the process area. Select areas of interest-, optimise contrast-, zoom-, measure using video cursor-, print

- Software — ProcessPower Software
ProcessPower control software provides synchronised control over part motion, process motif and laser function, including handy sub-routines and import of industry standard files

- Vision — Part Lighting and Viewing
Through-the-lens (TTL) vision system with integrated and adjustable coaxial part illumination

- Laser — ATLEX 300 SI short Pulse excimer
The ProMaster is a perfectly matched add-on unit to the ATLEX 300 SI short pulse excimer laser, with the highest beam brightness of its class, superb beam quality and long gas lifetime

- Mask — Mask Options
PC driven mask selector with 32 motifs on an interchangeable plate. Optional RVA aperture allows an unlimited number of user-defined 'virtual motifs' to be created and stored in PC memory for subsequent recall
Mask details

- Energy — Energy Controller
Select the appropriate processing conditions for polymer ablation, metal stripping, direct writing, etc., from 0.5-5 J/cm²

- Stability — Natural Granite Base
the natural granite base offers superb stability for precision micromachining

- Motion — Part motion assembly
Part motion over 100 x 100 mm with 1 µm resolution and digital position readout. ProcessPower for PM software allows all types of movement synchronised to laser firing

- Focus — Precision Focus
Smooth manual focus control over 0-10 mm with WYSIWYG feature. Ensures that when the CCTV is in focus the UV projection is also automatically in focus

- Lens — UV Projection Lens
Three-element confocal UV projection lens with 1.5 µm resolution, specially designed for UV mask projection applications

- Theta — Rotation Stage
Manual rotation stage with full 360° travel, aids alignment of parts to the X,Y axes

- Part — Vacuum Chuck
Standard part holder is an 80 mm vacuum chuck for secure holding of all flat parts

- Shield — Coaxial Gas Nozzle
A coaxial gas nozzle provides He shield gas for debris-free processing of polymers, and efficient removal of ablation products
