| Laser |
| Wavelength |
248 nm (193 nm option) |
| Pulse energy |
18 mJ at 248 nm (10 mJ at 193 nm) |
| Repetition rate |
0–300 Hz (500 Hz option) controlled by ProcessPower software |
| Pulse duration |
5–6 ns |
| Beam dimensions |
4 x 6 mm |
| Beam divergence |
2 x 1 mrad |
| Beam delivery |
| Energy density on target |
0.5–5 J/cm2, manual setting of energy density using graduated control. Additional internal condenser lenses (inverse BET) allow setting up for user definition of energy density range (with trade-off for process area) |
| Feature size |
Up to 250 µm, determined by mask, or write in X and Y using selected motifs |
| Standard mask changer |
Linear motorised 32-position motif selector, standard mask includes a range of circles, squares and stripes. User-determined mask plates can also be fitted |
| Optional additional mask unit |
Motorised rectangular aperture. When used in conjunction with the linear mask selector an infinite number of combination motifs can be created and stored in system memory for late recall |
| Machining resolution |
<1.5 µm |
| Part viewing |
Through-the-lens image is presented in a window by the Process Power software. Full-screen magnification is 400X. Features include electronic zoom on selected areas, video measuring cursor, output to printer |
| Lighting |
Coaxial |
| Shield gas / fume extraction |
Integrated coaxial nozzle provides He atmosphere with efficient fume extraction to external blower |
| Part Positioning |
| Part holder |
80 mm diameter vacuum chuck |
| XY travel |
100 x 100 mm |
| XY Resolution |
1 µm |
| XY Repeatability |
1–2 µm |
| Theta |
0 – 360° continuous rotation with manual control |
| System Control |
| Controller |
Industrial PC: Pentium III, 512 MB RAM, 30 GB hard disk |
| Software |
ProcessPower for PM (see details) |
