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UV Projection Lenses

A range of UVFS+CaF2 triplet lenses designed specifically for high-quality UV micromachining applications.

Performance

Key features

  • Demagnification range 4 – 20x, optimised at 10x
  • Long working distance >75 mm for safe machining
  • <1.5 µm resolution with 50%/µm edge contrast
  • 2 mm image field
  • Perfectly visible correction for through the lens (TTL) viewing
  • Fully coated for high efficiency at both UV and visible wavelengths
  • High energy-handling capacity
  • Models available at popular UV machining wavelengths

Specification

N° of elements3
MaterialsUVFS+CaF2
Clear aperture22 mm
Length15.6 mm
Mount shoulder to s17 mm
Shoulder threadM45 x 0.75
Effective focal length86.9 mm
DemagnificationRange = 4 – 20x
Optimum = 10x
Object-image distance1 055 mm
Back focal distance88.4 mm
N.A.0.105
Field2 x 2 mm
Image distortion5 x 10-5
Resolution 15–85%<1.5 µm

Performance

Point spread function
Edge contrast profile
Technote